An application of d-JADE controller in thin film processes

This paper demonstrates an algorithm “double Just-in-time Adaptive Disturbance Estimation (d-JADE)” for use in on-line run-to-run control. This method is used to adaptively identify the contributions to variation from each individual context item. Through monitoring the data of both EWMA and d-JADE algorithms on-line, it appears that d-JADE provides increasingly superior performance in state estimation over EWMA.