Tip-tilt-pistion micromirror based on symmetrical lateral-shift-free piezoelectric actuators

This paper presents the design, fabrication and characterization of a high-fill-factor tip-tilt-piston (TTP) micromirror which employs four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The measured resonant frequencies of the fabricated micromirror are 990 Hz (piston) and 1450 Hz (rotation), respectively. At resonance, the maximum piston motion is 92 μm and the rotational scan angle is 9.6°, both measured at a 5 Vpp sinusoidal driving voltage.