Femtosecond infrared laser annealing of ferroelectric PZT films on a metal substrate

Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr0,54, Ti0,46)O3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. Piezo-force microscopy technique allowed us to investigate local polarization properties of annealed areas.