Laser microstructuring of congruent lithium niobate by UV ps-pulses

We present single shot experiments at different pulse energies for LiNbO₃ on c⁺-side and c^--side by using a laser wavelength of 355 nm and a pulse duration of about 10 ps. Furthermore, we demonstrate laser micromachined grooves with high spatial pulse overlap on the c⁺-side of LiNbO₃. Here a (rms) sidewall roughness as low as 20 nm has been achieved at an ablation depth of 1.2μm.