CMUTs with interlaced high- and low-frequency elements

We demonstrate the potential of Capacitive Micromachined Ultrasound Transducers (CMUTs) for dual frequency transducer applications. We show that high and low-frequency elements may be interlaced in composite cells smaller than the shortest wavelength of ultrasound from the array. Feasibility devices are simulated, designed, and then fabricated using a modified sacrificial release process.