A ZnO/silicon Lamb wave filter using phononic crystals

This paper presents numerical and experimental studies on a ladder-type Lamb wave filter using phononic crystal gratings. The ladder-type filter was constructed by introducing two line defects as resonant cavities in a silicon-based phononic crystal plate. In this study, the resonant cavities utilizing phononic crystals were analyzed and designed by finite element method. The experimental results demonstrate that a 1-stage ladder-type filter shows the -24 dB insertion loss, 28 dB out-of-band rejection and 0.11 MHz (0.07%) 3dB bandwidth at 159 MHz.