Three-dimensional silicon micromechanical parts manufactured by electro-discharge machining

Currently, nearly all microcomponents are fabricated by micro-electronic production technologies like etching, deposition and other (photo)lithographic techniques. In this way, the main emphasis has been put on surface micromechanics. The major challenge for the future will be the development of real three-dimensional microstructures that could be used as components for microrobots. Electro-discharge machining is a versatile technique which is very well suited for machining complex microstructures. This paper presents an overview of the applicability, of micro electro-discharge machining for manufacturing silicon micromechanical parts. Also, practical examples are provided.