A 100 kHz vibratory MEMS rate gyroscope with experimental verification of system model's frequency scaling

The working frequency f₀ of vibratory MEMS angular rate sensors is a main optimization parameter. To investigate the specific challenges of increasing f₀ we designed a new device with f₀=100 kHz. Key parameters of the 100 kHz device are theoretically and experimentally compared with those of a 15 kHz reference sensor. The experimental results show the validity of the theoretical frequency scaling of the key parameters. The measurements show benefits and disadvantages of MEMS vibratory gyroscopes with increased f₀>;>;30 kHz.