Fabrication of mass sensitive piezoresistive cantilever structure for biochemical detection

This paper reports a mechanical micro-structure MEMS (Micro-Electricomechanical System) based sensor fabrication using CMOS platform for biochemical detection. The structure is monolithically integrated with the detection circuit/ readout circuit. Silicon dioxide layer is implemented in the current MEMS structure as an absorption layer for bio targets by CMOS process tools. Result shows that the fabricated piezoresistive cantilever MEMS have linear relation output voltage respond with the different weight of DNA applied.