Fabrication of micro mirror array with hidden joint structures

Micro mirror arrays with hidden joint structures (pin and staples) are designed and fabricated. In order to achieve a high fill-factor and to remove the problems caused by elastic spring structures, a joint structure is placed under the mirror plate. All the structural components except the titanium electrode are fabricated with thermally evaporated aluminum. Semi-cured photoresist and thick photoresist are used for sacrificial layers. The static characteristics of the micro mirror are measured by applying a voltage difference between the mirror plate and an address electrode.