Thermal analysis of the liquid floating rotor type micromachined gyroscope

Temperature has a great influence on the performance of the micro machined gyroscope. A finite element model was proposed to analysis the temperature field of the liquid floating rotor type of micro gyroscope using COMSOL. The temperature distribution of the gyroscope was studied at different rotation speed using the model. The simulation results indicated that the friction of the rotor is the main heat source. When the rotor rotation speed is 10000rpm, the maximum temperature is 38 °C. The result of the proposed model is in excellent agreement with the experimental measurements.