Composition of SiC layer grown on Si(111) substrate analyzed by plan-view energy dispersive spectroscopy

In this work, the composition distribution in SiC films grown on Si(111) using chemical vapor deposition (CVD) method has been measured by the plan-view energy dispersive spectroscopy (EDS). The measuring original EDS data are modified by considering the multilayer structure and the attenuation due to the diffuse reflection at the interface of the voids. The relative error rate of the improved EDS data is reduced by ∼ 45% comparing to the measurement result of X-ray photoelectron spectroscopy. Such a modification shows that the plan-view EDS method can be an effective way for characterizing element content of the SiC/Si structure in semi-quantitative measurement.