A micro-fluid channel calorimeter using BiSb/Sb thin film thermopiles

Here, a new type of micro calorimeter is presented, characterized by a thermally insulated flow channel with two inlets and one outlet, an interdiffusion zone, and a detection zone with integrated thin film transducers based on thermopiles of the highly sensitive material combination of Bi/sub 0.87/Sb/sub 0.13/ and Sb. This micro fluid calorimeter can be integrated in flow injection arrangements. This way, the general principle of heat detection can be introduced in micro flow injection analysis and related applications. The micro fluid device is characterized by thermal relaxation measurements and by chemical testing.