Hall devices for magnetic sensor microsystems

Typically, a magnetic sensor microsystem is a combination of a Hall device, some electronics, and ferromagnetic components. Usually, the Hall device has the form of a plate buried into the chip surface. Non conventional forms include: a vertical Hall device, sensitive to a magnetic field parallel with the chip surface; and a cylindrical Hall device, optimized to sense the circular magnetic field around a current carrying wire. Using a merged combination of two vertical Hall devices, a simple angular position sensor was made. A combination of vertical and horizontal devices gives a high accuracy 3D Hall probe.