Biocompatible polymeric wireless pressure sensor for intraocular pressure sensing application

Telemetric sensing is a promising method to accomplish non-contact and continuous disease diagnoses. Implantable intraocular pressure (IOP) sensor using wireless telemetric technology is highly desirable. This paper presents a fully integrated SU-8-based passive wireless inductively-coupled pressure sensor, especially designed for IOP sensor. The sensor was microfabricated using biocompatible materials - gold and SU-8 - to form the LC parallel circuit and the pressure sensitive diaphragm. Multi-SU-8-layers were stacked to completely isolate the working circuit from the biological tissue medium. The characterization result of IOP sensor shows that it has relatively high responsivity (683 KHz/mmHg) in the pressure range of 0 – 60 mmHg and has pressure resolution much lower than 1 mmHg in both air and saline medium.