Fabrication of SiC p-i-n betavoltaic cell with 63Ni irradiation source

A high open-circuit voltage betavoltaic cell based on a SiC pin homojunction is achieved. The open-circuit voltage (0.98V) and the power density (8.0nW/cm
²
) of the cell are the highest in the all reported SiC betavoltaic cells using
⁶³
Ni as irradiation source. The fill factor (FF) of the cell (74%) is the highest in all of the wide band gap semiconductor betavoltaic cells, including SiC and GaN.