Quantum well mach-zehnder modulator with single microring resonator and optimized arm length

We propose and demonstrate a low-voltage InGaAs/InAlAs multiple quantum well Mach-Zehnder (MZ) modulator with a single microring resonator and an arm with an optimized length. The quantum well wafer was grown by molecular beam epitaxy and the device structure was fabricated by photolithography and dry etching processes. The half-wave voltage was successfully reduced to one- fourth compared to a conventional MZ modulator.