Positioning performance of moving table with reducer unit

A new moving table has been developed to realize both the fine motion and the coarse motion independently and/or simultaneously to reduce the positioning time under the limitation of guaranteeing the positioning accuracy. The conventional reducer unit driven supported by a hollow stepping motor is utilized. The fine-coarse motion of the developed mechanism is realized by only mechanical parts consisted of two stepping motors and a reducer unit (Reducer reducer) aligned in an axis. The main characteristic is that there are no stroke limitations in the fine and coarse motions with respect to the conventional fine-coarse motion stage driven by PZT device. The basic performances of positioning are evaluated by the feedback positioning system. The paper reports the fine and coarse positioning performances of the developed system.