Optimal design of piezoelectric-driven tilting mirror for laser scanner

Recently, laser scanners have been used for laser processing such as cutting, welding and grooving. It needs a highspeed driving to minimize crack caused by thermal shock of brittle materials. Therefore, a novel laser processing system has been investigated that is composed of a laser source and a piezoelectric-driven tilting mirror to control reflection angle of laser beam, and a stage equipped with the tilting mirror. In this study, a piezoelectric-driven tilt mirror is designed and analyzed for scanning performance that needs to make a beam spot of 30μm, a pattern width of 1mm, and scanning speed of 1m/s. Then, structural analysis on the tilting mirror with three piezoelectric actuators is calculated to determine maximum reflection angle, resonance frequency.