A nozzle flapper electro-pneumatic proportional pressure valve driven by piezoelectric motor

Electro-pneumatic proportional valve, as an important electro-pneumatic conversion element in pneumatic technology, has been widely applied in many pneumatic servo control systems. A novel nozzle flapper electro-pneumatic proportional pressure valve driven by piezoelectric motor instead of the traditional torque motor was proposed in this paper. The structure and working principle of this type electro-pneumatic proportional pressure valve were described. And a mathematical model was established. A testing system was developed and the prototype valve was tested. Test results showed that under the 0.3 MPa working pressure, an output performance of linearity ±0.5%, resolution 0.1%, hysteresis ±0.5% were obtained.