Epitaxially deposited SrVO/sub 3/ conducting films by laser ablation and metal organic chemical vapor deposition

We have grown epitaxial thin films (100-200 nm) of SrVO/sub 3/ with pulsed laser deposition and metal organic chemical vapor deposition on Si, YSZ, MgO, LaAlO/sub 3/, and and SrTiO/sub 3/. These films range from insulating to semiconducting to metallic, depending on growth conditions. Resistivity has been measured with the standard four point method, and has been found to be as low as 1 /spl mu//spl Omega/-cm for SVO on Si with a YSZ buffer layer. This is comparable to 10 /spl mu//spl Omega/-cm for Pt. XRD studies have also been done to determine the crystal structure of the films.