Liquid delivery MOCVD of PLT for pyroelectric detectors

Pb/sub 1-x/La/sub x/Ti/sub 1-x/4/O/sub 3/ (PLT) films have shown promise for uncooled infrared detector applications. A metalorganic chemical vapor deposition (MOCVD) process has been developed to deposit PLT at 535/spl deg/C using the liquid delivery technique on two inch Pt/ZrO/sub 2//Si substrates. Metalorganic /spl beta/-diketonate and mixed /spl beta/-diketonate-alkoxide precursors were flash vaporized and delivered into a large area MOCVD chamber and high quality crystalline perovskite films were deposited with La contents of 0.02/spl les//spl times//spl les/0.28. Room temperature dielectric constant varied between 400 940 for films /spl sim/1200 /spl Aring/ thick and increased with increasing La content. Pyroelectric measurements were carried out using the Byer-Roundy technique. The pyroelectric coefficients were found to depend on film orientation which varied between [100] and [111] with the Pb/Ti ratio; values between 6-13 nC/cm/sup 2/K were observed.