Silicon nanowire (SiNW) growth using Vapor Liquid Solid method with gold nanoparticle (Au-np) catalyst

Silicon Nanowire (Si-NW) is one of the promising nanodevices which attract many attentions due to its potential applications in many fields. We used Vapor-Liquid-Solid (VLS) method to grow SiNW on silicon <;100>; with gold nanoparticles (Au-np) as catalyst. SiNWs are grown in CVD reactor with Vapor-Liquid-Solid method. SiNWs with diameter 20-40 nm and lenght ~500-800 nm has been successfully grown. As a preliminary analysis on its electrical behaviour we used online simulator for nanowires to predict its I-V characteristics.