Piezoelectric response of novel multiferroic microcantilevers

Recently developed magnetoelectric (M-E) multiferroic system, Dy modified BiFeO₃ (Bi_0.7Dy_0.3FeO₃ or BDFO) exhibits ferromagnetism and ferroelectricity at room temperature with significant M-E coupling. We have been successful in developing a CMOS compatible MEMS fabrication process using BDFO and fabricated BDFO microcantilevers directly on Si. The fabricated BDFO cantilevers are tested for the actuation using magnetic as well as electric fields. In this paper, the piezoelectric behavior of BDFO thin films and microcantilevers directly fabricated on Si are reported. These results suggest BDFO as a possible substitute for lead-free MEMS in the near future.