Electrical microchannel silicon sensor for solvent detection

This paper has been devoted to creation of the sensor based on ordered microchannel silicon resistor for electrophysical detection of liquids. Interactions of sensor with organic and inorganic liquids (acetic acid, ammonium hydroxide, ethyl alcohol, water-alcohol solution and deionized water) were studied by high frequency conductance measurements. It was established that the sensor had specific response for each liquid. It was shown that the proposed electrophysical method allowed identifying the liquid interacted with the sensor.