Micro-beam actuator based on conducting interpenetrating polymer networks: From patterning process to actuation in open air

In this paper we report on conducting polymer micro-actuators which have been fully patterned using photolithography and plasma dry etching processes. The interpenetrating polymer network (IPN) architecture used in this work allows the interface and adhesion problems, which have been reported in the design of classical conducting polymer-based actuators, to be resolved. Very thin 17 μm actuator films can be obtained and then patterned using the microfabrication technologies. IPN-actuators were etched to obtain free-standing micro-beams (L*l*T=900*300*17 μm³) operating in air and in a low vacuum. These micro-sized actuators are potential candidates in numerous low frequency applications, including micro-valves, micro-optical instrumentation and micro-robotics. Moreover, due to the response speed performances of our IPN architecture, this material has been considered as the main actuator for the flapping wings of an artificial insect.