Ultrasensitive dielectric filled Lamé mode biomass sensor

A new high performance biomass sensor is presented. The developed sensor shows a high potential to detect small biological agents compared to previous biomass sensors by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, quality factor of 10,000 and the mass sensitivity of −400 Hz/pg. The resonators were fabricated using the silicon-on-insulator MEMS process.