HRTEM Images of a-C:H Thin Films Deposited by G-TVA Technique

The aim of this paper is to an report analysis of the different characteristics of the coatings obtained by an extension in applicability of the thermionic vacuum arc method, i.e., gaseous thermionic vacuum arc using gases as precursors, instead of solid materials. The morphology and structure of the film were investigated by transmission electron microscopy (TEM) provided by high-resolution TEM with 1.4-Å resolution and 1.2-M magnification.