Capacitive Micro-accelerometer PSPICE Simulation Model Research

During the process of establishing the capacitivmicro-accelerometer PSPICE Simulation Model, consider in the precise electrical model of the capacitance, According tthe characteristics of MEMS capacitance, established micraccelerometer PSPICE simulation model. In the model, thelectrical and mechanical coupling process of Capacitiv MEMS sensor was analyzed. By using this simulation mode the closed-loop detection circuit was simulated by PSPICE The simulation results show that the closed-loop capacitanc detection circuit can effectively improve the linearity and thmeasure range of the capacitive micro-accelerometer, it caeliminate mechanical resonance. But the closed-loop system' stability and response speed must be ensured. Therefore, the stablishment of capacitive micro-accelerometer PSPIC simulation model is very valuable to the design and simulatio of the closed-loop capacitive detection circuit.