Control of crystalline orientation and diameter of Si nanowires based on VLS method and electrodeposition of catalyst using AAO template

Control of epitaxial crystal growth orientation and diameter of Si nanowires were accomplished using anodic aluminum oxide (AAO) template formed on Si substrates. Vapor-Liquid-Solid (VLS) growth of Si nanowires was initiated on the size-controlled Au catalyst electrodeposited in AAO, and growth direction of nanowire was determined by choosing orientation of Si substrate.