In-situ study and modeling of the decreasing reaction rate at the end of CoSi2 formation

In-situ X-Ray diffraction was used to determine CoSi₂ kinetics growth from 100 nm CoSi. In this work, we discuss about an unexpectedly slow reaction that is observed at the end of CoSi₂ formation. A 1D model has also been developed from these experiments in order to reproduce the sequential growth of cobalt silicides and the end of the reaction experimentally observed in this study.