Current and emerging production applications/trends of MeV technology

Current production applications of MeV implantation will be reviewed focusing on CMOS memory (DRAM, SRAM and Flash) and CMOS logic (ASIC and Microprocessor) device manufacturing. Also, the motivation from a manufacturing point of view will be presented for MeV twin and triple well formation including process simplification, cost reduction and improved productivity/capacity and profits. Replacement of traditional medium current implanters will also be discussed along with emerging and future production applications/trends.