The influence of PcCu layer crystalline structure on the parameters of SAW gas sensors

This paper presents some problems concerned with SAW NO/sub 2/ sensors employing copper phthalocyanine (PcCu) as the chemical interface. We have investigated the influence of crystalline structure of PcCu coating on the sensor sensitivity of generated frequency. The experiments were carried out for SAW delay lines on STX quartz and 128/spl deg/ YX lithium niobate. It was found that for the investigated range of parameters the /spl beta/-PcCu layer provides several times better sensor sensitivity and temperature stability of SAW delay line generation frequency than /spl alpha/-PcCu layer of the same mass. This is valid for both substrates used.