Establishing Uncertainties for On-Wafer S-Parameter Measurements

Although on-wafer high-frequency measurements are nowadays commonly used, uncertainties for scatteringparameter measurements in planar transmission lines are still not yet established - a problem which has been long solved in coaxial lines and waveguides. We describe a GUM-compliant approach that is capable of providing a traceability path for on-wafer measurements up to 50 GHz using the TRL calibration algorithm.