Neutral pressure effects on ionization characteristics of electron cyclotron resonance discharge

The code with quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision (PIC/MCC) method is developed for the research of ionization process of argon electron cyclotron resonance (ECR) discharge. Monte Carlo techniques are used on a large ensemble of charged particles to ensure accurate representation of the stochastic process. Recent work has focused on the effects of neutral pressure on the characteristics of ECR discharge and ECR plasma.