Fabrication and characterization of flexible flat electrodes for biomedical microdevices

Flat electrode arrays satisfy manifold biomedical applications. In this work, platinum flat electrodes sandwiched between two flexible PDMS layers are fabricated and characterized. A contact profilometer and a FIB/FEGSEM system are used for samples topology characterization. Electrical characterization covers I/V curves and stability tests. Platinum wavy surface reinforces the achieved samples compliance and therefore their suitability for human implant applications. However, the Pt electrical performance is strongly conditioned on the elastic PDMS layers. Fabrication process must be optimized to achieve a trade-off between mechanical and electrical behavior.