Volatge-sensor monolithically integrated in 3.3 kV IGBTs

This work deals with the study of a voltage sensor monolithically integrated with 3.3 kV-50 A IGBT. First, the sensor operation mode is explained, and the study of its behaviour, both stationary and transient regimes, is presented for the first time. In addition, the study of its performance under inductive turn-off conditions has been made. To explore this event, physical TCAD simulations have been carried out, comparing the IGBTs with and without voltage sensor.