VLSI circuit challenges for integrated sensing systems

The challenges facing the development of monolithic instrumentation systems are reviewed. Sensor technology is discussed, and examples of merging transducer and circuit processes are given. It is noted that, for many future systems, transducers, analog circuits, logic, and memory should probably be merged on a single chip, and system-level standards are needed to focus such efforts. It is concluded that microcomputer-based sensing nodes capable of functioning as smart peripherals and employing features such as self-testing, autocalibration, and PROM-based digital compensation should be realizable on a single chip within a decade