Solid-state microsensors and smart structures

Solid-state microsensors have been recently developed for the measurement of a number of physical and chemical parameters for use in today's instrumentation and control systems. This paper reviews the state-of-the-art in the development of silicon micromachining technologies for the fabrication of silicon microsensors. Micromachining technologies such as bulk silicon micromachining, surface micromachining, and electroplating techniques are first reviewed, followed by a discussion of various thin-film materials used in the implementation of required microstructures. Several examples of silicon microsensors, including a 1024-element silicon tactile imager, and a thermally-based pressure and flow sensor, are presented. Finally, a discussion of potential use of these devices in smart structures and systems is presented