Robotic manipulation and control for Micro and Nano mechatronics

Mechatronics was born in Japan in 1969. It is the synergetic integration of the Mechanical engineering and Electronic engineering with computer technology. It is a design discipline for the system integration for the structure and control of the target system. Today's mechatronics has advanced more and more to wider and broader areas, such as Micro and Nano mechatronics. In this lecture, this field is overviewed from the standpoint of robotic manipulation and control Micro mechatronics is one of Mechatronics areas and has made remarkable progress recently, such as micro sensor and actuator for automotive technology, avionics technology, bio-medical manipulation technology, consumer electronics, and many others. It is mainly based on the Silicon lithography technology and other micro-fabrication technologies. Micro TAS (Total Analysis System) is one of the Micro technological applications. Nano mechatronics deals with the much smaller sized world than the Micro mechatronics. Nanotechnology gives technologies for nano-fabrication, nano-instrumentation and nano assembly for these areas, including nano-sensor, actuator and manipulation technology. Bio nanotechnology based on the Nano-mechatronics is also promising for the research in life-science. Thus the micro and nano robotic manipulation and control will play an important role for the 3 dimensional fabrication and assembly system and those application examples will be shown in this lecture.