A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film

The automated chemical-solution-deposition machine, which can repeat a deposition and a crystallization of the PZT thin film, is developed for micro actuator with multilayered PZT thick film. A 2 and 4-inch wafer can be handled in the drying, sintering and crystallizing furnaces step by step using robot arm after being dispensed and spin-coated sol-gel solution. The robot arm movement, the temperature of furnaces and the processing times of every step can be adjusted using a programmable logic controller. The maximum thickness of deposited PZT film of 3.8-μm is achieved by 44-times iteration with 32-hours in one sequence. The remanent polarization of 10-μC/cm², the coercive field of 28-kV/cm and maximum polarization of 24-μC/cm² are obtained which shows the capability of soft piezoelectric material for the micro actuator.