Simulation and parameters optimization of power DMOS Trench Field Effect Transistors

DMOS Trench Field Effect Transistors (TrenchFETs) have been taken as an object for electrical parameters optimization with the special developed software based on Excel table processor. Using this software the values of resistance between the source areas and the drain area of the open DMOS TrenchFET have been minimized as well as the values of the output and the internal capacitance of the cell transistor structure. The efficiency of the developed software is proved by the results of testing the manufactured series of DMOS TrenchFETs as their electrical parameters correspond to the best world known analogues.