Sensitivity analysis of an implantable LC Based passive sensor

A versatile implantable pressure sensor that consists of a LC resonator and a radio-frequency probe with two orthogonal coils was developed for implementable medical applications. The MEMS technology makes it possible have a miniature, biocompatible and highly sensitive LC based passive sensor. Though a successful design was demonstrated, the development of an analytical model will enable further performance optimization. In this paper, first, the sensitivity of the entire sensor system is derived based on an equivalent circuit model. Then, an apriori design method of a miniaturized, single-layer circular MEMS inductor is proposed to optimize the sensitivity of the sensor system. The proposed design method is also verified using the ADS-Momentum.