Infrared-Light Interference System Based on Linnik-Type Interferometric Microscope for Three-Dimension Profile Measurement

Infrared-light interference system for three-dimension profile measurement is proposed in this paper. The measurement system comprises infrared-light halogen source, linnik-type interferometric microscope, infrared-light InGaAs CCD array camera and ceramic piezo. With transmission to GaAs wafer, measured three-dimension profile and steps heights of microstructure are highly consistent with the results obtained from famous commercial instrument MSA 400 via Stoilov phase-stepping algorithm. The system has widely potential applications in the field of MEMS, such as reconstructing the internal profile measurement of encapsulation devices and analyzing the quality evaluation of bonding interface based on semiconductor materials.