325GHz CPW band pass filter integrated in advanced HR SOI RF CMOS technology

Today, measurement of 65nm CMOS and 130nm-based SiGe HBTs technologies demonstrate both fT (current gain cut-off frequency) and fmax (maximum oscillation frequency) higher than 200 GHz, which are clearly comparable to advanced commercially available 100nm III-V HEMT. This increase allows new millimeter wave (MMW) applications on silicon. One of the success keys is then the passive integration. In this paper, on-chip coplanar waveguides (CPWs), which have been achieved in STMicroelectronics advanced nanometric RF CMOS High Resistivity (HR) SOI (ρ> 1kΩ·cm) process, and characterized up to 325GHz are reported. Moreover, for the first time passive circuits working @ 325GHz have been achieved on silicon and characterized demonstrating state-of-the-art performances and good agreement with electric simulations.