Fabrication of high-power VCSEL with reticular electrode

We report the fabrication of a novel high-power VCSEL with reticular electrode in this letter. The analysis shows that the reticular electrodes can improve the homogeneity in the injected current and heighten VCSEL optical output power. The high-power reticular electrode VCSELs with 500μm aperture have been made and tested. Testing results show the slope efficiency of 0.75mW/mA, output power of up to 410mW and a peak power conversion efficiency of 35%. Its near-field pattern exhibits a homogeneous distribution. The high-power reticular electrode VCSEL has better optoelectric characteristic.