Fabrication of the InP nanopillars

This paper presents a way to fabricate nanopillars of InP, which is obtained based on the nanosphere mask by electrochemical etching. The nanopillars are cylinder-shaped, and the smallest feature size can be ∼5nm. The results have shown that the formation of the nanopillars is devoted to the areas of the tangency between the nanospheres and the wafer. The blue shift peak of photoluminescence spectra was observed in room temperature, and it was approximately 21meV and attributed to the quantum confinement effect.