Micromechanical structures with optical detection integrated on silicon

We have determined closed form expressions, that can be used as a satisfactory tool for the design and optimisation of optomechanical pressure sensors based on simple membranes with small deflections. The finite element software package ANSYS was used to compare the results. The relative change in the refraction index in the waveguide was calculated using the stress-elastooptical coefficients for SiON given in literature.