Tunable 2D electromagnetic band-gap (EBG) structures based on micro-electro-mechanical systems (MEMS) for THz frequencies

In this work, the authors report various tunable THz EBG structures consisting on movable MEMS membranes, allowing rearrangement of single and multilayered periodic structures. The analysis, design and fabrication of the MEMS devices, as well as its integration with EBG structures, are discussed. Various examples of the devices applicability in EBG structures, such as FSS and AMC, are presented.