Spatially resolved studies of optical emission from discharge source for mass spectrometry

Summary form only given. Radiofrequency Glow Discharges (rf-GD) are commonly used as plasma sources in combination with optical emission spectroscopy (OES) or mass spectrometry (MS) due to their ability to produce temporally and spatially separated atomization and excitation/ionization processes. Rf-GD spectroscopy is a fast and reliable analytical technique, which allows bulk and depth profile analysis, of conducting and non-conducting solid samples¹. In addition, the time resolved signal acquisition of pulsed- rf-GD has been shown to be of particularly interest for analytical applications².